CDSEM(線寬檢測(cè))
涌淳半導(dǎo)體專注于半導(dǎo)體工藝設(shè)備的研發(fā)、制造、銷售及售后一體化服務(wù),提供半導(dǎo)體廠商工藝設(shè)備的一站式解決方案。
關(guān)鍵詞:
半導(dǎo)體設(shè)備、半導(dǎo)體工藝
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產(chǎn)品描述
CD-SEMs (critical dimension scanning electron microscopes) are widely used as the main tool for CD measurement in semiconductor processes. In recent years they have helped in achieving improved precision for smaller design rules, and faster measurements for greater numbers of measurement points. New functions have also been implemented, such as automation of measurements through the effective utilization of design data, and measurement of hazardous locations using positional information.
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